Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection

Permanent URI for this collectionhttps://hdl.handle.net/11147/7148

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Subject: search.filters.subject.Depth profiling

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  • Article
    Citation - WoS: 10
    Citation - Scopus: 10
    Evolution of Sio2/Ge Multilayer Structure During High Temperature Annealing
    (Elsevier Ltd., 2010) Şahin, D.; Yıldız, İlker; Gençer İmer, Arife; Aygün, Gülnur; Slaoui, A.; Turan, Raşit
    Use of germanium as a storage medium combined with a high-k dielectric tunneling oxide is of interest for non-volatile memory applications. The device structure consists of a thin HfO2 tunneling oxide with a Ge layer either in the form of continuous layer or discrete nanocrystals and relatively thicker SiO2 layer functioning as a control oxide. In this work, we studied interface properties and formation kinetics in SiO2/Ge/HfO2(Ge) multilayer structure during deposition and annealing. This material structure was fabricated by magnetron sputtering and studied by depth profiling with XPS and by Raman spectroscopy. It was observed that Ge atoms penetrate into HfO2 layer during the deposition and segregate out with annealing. This is related to the low solubility of Ge in HfO2 which is observed in other oxides as well. Therefore, Ge out diffusion might be an advantage in forming well controlled floating gate on top of HfO2. In addition we observed the Ge oxidation at the interfaces, where HfSiOx formation is also detected. © 2009 Elsevier B.V. All rights reserved.
  • Article
    Citation - WoS: 2
    Citation - Scopus: 4
    Tof-Sims Depth Profiling Analysis of the Uptake of Ba2+ and Co2+ Ions by Natural Kaolinite Clay
    (Elsevier Ltd., 2004) Shahwan, Talal; Erten, Hasan N.; Black, Leon; Allen, Geoffrey Charles
    The sorption behavior of Ba2+ and Co2+ ions on a natural clay sample rich in kaolinite was studied using time-of-flight secondary ion mass spectrometry (ToF-SIMS). Depth profiling at 10-Å steps was performed up to a 70-Å matrix depth of the clay prior to and following sorption. The results showed that Co2+ is sorbed in slightly larger quantities than Ba2+, with significant numbers of ions fixed on the outermost surface of the clay. Depletion of the ions K+, Mg 2+, and Ca2+ from the clay lattice was observed to accompany enrichment with Co2+ and Ba2+ ions. The data obtained using X-ray powder diffraction (XRPD) and scanning electron microscopy (SEM) indicated insignificant structural and morphological changes in the lattice of the clay upon sorption of both Ba2+ and Co2+ ions. Analysis using energy dispersive X-ray spectroscopy (EDS) showed that the average atomic percentage (±S.D.) of Ba and Co on kaolinite surface were 0.49±0.11 and 0.61±0.19, respectively, indicating a limited uptake capacity of natural kaolinite for both ions.