Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
Permanent URI for this collectionhttps://hdl.handle.net/11147/7148
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Article Citation - WoS: 2Citation - Scopus: 2In-Situ Thin Film Copper-Copper Thermocompression Bonding for Quantum Cascade Lasers(Springer, 2021) Rouhi, Sina; Özdemir, Mehtap; Ekmekçioğlu, Merve; Yiğen, Serap; Demirhan, Yasemin; Szerling, Anna; Kosiel, Kamil; Kozubal, Maciej; Kruszka, Renata; Prokaryn, Piotr; Ertuğrul, Mehmet; Reno, John L.; Aygün, Gülnur; Özyüzer, LütfiThe choice of metals, bonding conditions and interface purity are critical parameters for the performance of metal-metal bonding quality for quantum cascade lasers (QCLs). Here, we present a novel approach for the thermocompression bonding of Cu-Cu thin films on GaAs-based waveguides without having any oxide phase, contamination or impurities at the interface. We designed a hybrid system in which magnetron sputtering of Ta, thermal evaporation of Cu and Cu-Cu thermocompression bonding processes can be performed sequentially under high vacuum conditions. GaAs/Ta/Cu and Cu/Ta/GaAs structures were thermocompressionally bonded in our in-situ homebuilt bonding system by optimizing the deposition parameters and bonding conditions. The grown thin film and the obtained interfaces were characterized using x-ray diffraction (XRD), scanning electron microscopy (SEM) and energy-dispersive x-ray spectroscopy (EDX) techniques. The optimum Ta and Cu films' thicknesses were found to be about 20 nm and 500 nm, respectively. EDX analysis showed that the Ta thin film interlayer diffused into the Cu structure, providing better adhesivity and rigidity for the bonding. Additionally, no oxidation phases were detected at the interface. The best bonding quality was obtained when heated up to 430 degrees C with an applied pressure of 40 MPa during bonding process.Article Citation - WoS: 13Citation - Scopus: 13Fourcross Shaped Metamaterial Filters Fabricated From High Temperature Superconducting Ybco and Au Thin Films for Terahertz Waves(IOP Publishing Ltd., 2017) Demirhan, Yasemin; Alaboz, Hakan; Nebioğlu, Mehmet Ali; Mulla, B.; Akkaya, M.; Altan, Hakan; Sabah, Cumali; Özyüzer, LütfiIn this study, we present a new, unique fourcross shaped metamaterial terahertz (THz) filter fabricated from both gold thin films and YBa2Cu3O7-δ high Tc superconducting thin films. A commercial electromagnetic simulation software, CST Microwave Studio, is used to design and optimize the metamaterial filter structures. The proposed fourcross shaped rectangular filter structure consists of periodic metallic rings where strip lines are located at the sides of the ring. Fourcross metamaterial filters are fabricated by using e-beam lithography and ion beam exhing techniques. Terahertz time-domain spectroscopy measurements validated the design predictions for both the center frequencies and bandwidths of the resonances due to the fourcross structures. The resonance switching of the transmission spectra was investigated by lowering the temperature below the critical transition temperature. This resonance switching effect is not observed in filters made up of metals. This novel fourcross rectangular resonator with a temperature-dependent resonance behavior holds great potential for active, tunable and low loss THz devices for imaging, sensing, and detection applications.Article Citation - WoS: 11Citation - Scopus: 13Metal Mesh Filters Based on Ti, Ito and Cu Thin Films for Terahertz Waves(Springer Verlag, 2016) Demirhan, Yasemin; Alaboz, Hakan; Özyüzer, Lütfi; Nebioğlu, Mehmet Ali; Takan, Taylan; Altan, Hakan; Sabah, CumaliIn this study, we have investigated the spectral performance of resonant terahertz (THz) bandpass filters which were produced from thin films with a metal-mesh shape. The aforementioned filters were fabricated from titanium, copper and indium tin oxide thin films on fused silica substrates by UV lithography with an array of cross-shaped apertures. Since the mesh period, cross-arm length and its width specify the spectral characteristics of the filters, we were able to reveal the performance of these filters experimentally using both a THz time domain spectrometer and a Fourier transform infrared spectrometer. A commercial electromagnetic simulation software, CST microwave studio, was used to verify the experimental data. The transmission of the filters are in the range 20–55 % at their relevant center frequencies. To our knowledge this study is the first to show that fabricated patterns based on ITO thin films can be used to filter THz radiation.Article Citation - WoS: 6Citation - Scopus: 7Thin Film Like Terahertz Bolometric Detector on Bi2212 Single Crystal(Springer Verlag, 2016) Semerci, Tuğçe; Demirhan, Yasemin; Miyakawa, Nobuaki; Wang, Huabing; Özyüzer, LütfiIn this study, we developed a microbolometer chip fabricated from high temperature superconducting Bi2Sr2CaCu2O8+δ (Bi2212) single crystals for the terahertz (THz) detection. For the manufacturing of the microbolometer chips, Bi2212 single crystals were transferred on substrate in the thin film like form and electron beam lithography, ion beam etching techniques were used. Resistance versus temperature behavior of the bolometer chips were performed by four probe technique in liquid nitrogen cryostat. Bi2212 microchips were integrated and characterized using in our custom-designed cryogenic bolometer system instead of expensive and massive cooling systems. The fabricated microchips significantly detected signals from the Stefan-Boltzmann lamp which includes a portion of THz radiation. The detected power and response time were studied for Bi2212 thin film like microbolometer chips. Our results demonstrated the feasibility of improved Bi2212 microchips could be used for bolometric detection for THz applications.
