Master Degree / Yüksek Lisans Tezleri
Permanent URI for this collectionhttps://hdl.handle.net/11147/3008
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Master Thesis Electrical Surface Modification and Characterization of Metallic Thin Films Using Scanning Probe Microscope (spm) Nanolithography Method(Izmir Institute of Technology, 2009) Büyükköse, Serkan; Okur, SalihThis thesis focuses on local oxidation of metallic thin films using atomic force microscopy (AFM). The primary aim of this thesis is to investigate the growth kinetics of oxide forms of these metallic materials and characterize the resulted oxide structures. In this study, tantalum, hafnium and zirconium thin films were used to be oxidized via AFM. During this work, metallic thin films were grown on Si and SiOx substrates with DC magnetron sputtering method. Thin films were characterized via x-ray diffraction, scanning electron microscopy and atomic force microscopy. Oxidation experiments were performed under different environmental conditions to explore the effect of influential parameters; such as bias voltage, oxidation time and relative humidity, and line shape oxide structures were created on metallic films. Dimensional analysis of created oxide structures was carried out measuring height and line-width of oxide lines as a function of applied voltage, oxidation time and relative humidity. In addition to the dimensional analysis, electrical characterization of metal-oxides was performed via AFM electrical characterization methods which are two terminal I-V measurements, electric force microscopy and spreading resistance measurements. At the end of the thesis, the capability of this method to create lateral metal-oxide-metal junction was shown oxidizing a tantalum stripe and performing in-situ resistance measurement. Patterning of tantalum stripes was accomplished by standard photolithography process and lift-off technique.Master Thesis Development of Nanopatterns on Self Assembled Monolayer (sam) Organic Films Using Scanning Probe Microscope (spm) Nanolithography Techique(Izmir Institute of Technology, 2006) Gül, Semra; Okur, SalihPatterning and fabrication of nanostructures on surfaces is a great demand for nanoscale electronic and mechanical devices. Current techniques such as electron beam lithography and photolithography provides limited resolution and they are not capable of reproducible in nanoscale. Among those, Scanning Probe Microscopy (SPM) lithography that uses a nanometer sharpened tip has demonstrated outstanding capabilities for nanometer level patterning on various surfaces. Moreover, SPM techniques offer creating nanopatterns of Self Assembled Monolayers (SAMs) with molecular precision and visualizing surfaces with the highest spatial resolution. In this work, nanoscratches on gold surfaces and oxidation patterns on titanium surface were successfully performed as example of SPM lithography. In the second stage, Octadecylamine-HCl, Octadecanetiol (ODT) and Decylmercaptan (DM) SAM organic films were fabricated on various substrates; i.e., mica, silica, titanium surface deposited on silicon, n and p type silicon, using self assembly film preparation techniques. The film thicknesses were measured with Atomic Force Microscope (AFM). Nanopatterns were fabricated on SAM films using AFM tip by exerting a local high pressure at the contact that causes the displacement of SAM molecules by a high shear force. It was observed that there was no formation of SAMs on n type Si and silica substrates whereas there were organic assemblies on the other substrates. Fabricated nanopatterns were examined and thickness measurement was done. Molecular lengths of the organics were evaluated by using of SPARTAM 02 LINUX-UNIX with the method of PM3 and the measured values were compared with the calculated ones and it was concluded that monolayers were formed on the surfaces.