Phd Degree / Doktora

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Access Right: Open AccessSubject: search.filters.subject.Chemical vapor deposition

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  • Doctoral Thesis
    Experimental and Computational Investigation of Transport Phenomena in Initiated Chemical Vapor Deposition (icvd) Process
    (Izmir Institute of Technology, 2017) Ateş, Selcan; Ebil, Özgenç; Ebil, Özgenç
    As a polymer thin-film deposition technique, initiated CVD (iCVD) is a heterogeneous process involving gas phase precursors and solid film formation on a solid/liquid substrates at different temperature regions. Obtaining fine-tuned film properties over different substrate geometries at different process conditions is a challenging tasks and requires experimental trials. The major goal of this study is to develop a computational model which describes all relevant transport phenomena occurring in iCVD process, and which is capable to predict the polymer film thickness at different deposition conditions for flat and/or non-flat substrates in a 3D reactor geometry. A Finite Element Analysis (FEA)-based 3D computational model, which can be applied to a variety number of iCVD reactor and substrate geometries, has been developed in the study. To validate the model, reported experimental conditions of 1H,1H,2H,2Hperfluorodecyl acrylate (PFDA) deposition with t-butyl peroxide (TBPO) initiator, and butyl acrylate (BA) deposition with t-amyl peroxide (TAPO) initiator, are applied to the model, respectively. The simulation results of both deposition processes show good agreement with experimental results reported in literature. Presented model successfully describes the relevant transport phenomena, and provides a priori predictions on polymerization rate, and film thickness on complex substrate geometries for a polymerization reaction with known kinetic data. For further studies, presented model can be modified or used as an approach for modeling of other types of CVD systems as well as facilitating process scale-up. The model can also extract valuable polymerization kinetics data provided that a sufficient number of experiments are performed at a specified substrate temperature, and process parameters and measured final film thicknesses are entered to the model.
  • Doctoral Thesis
    Functionalized Cvd Grown Graphene for Gas Sensing Applications
    (Izmir Institute of Technology, 2017) Yağmurcukardeş, Nesli; Çelebi, Cem; Çelebi, Cem; Ünverdi, Özhan
    Graphene is a two dimensional one-atom thick sheet of sp2 bonded carbon atoms arranged in a honeycomb lattice structure. It has high electron mobility and it is the material with the lowest resistivity at room temperature. By changing the edge properties with chemical modification, few-layer graphene may gain new magnetic properties. Besides having unusual electronic properties, single-layer graphene has important gas sensing capability. With the adsorption of the gas molecules, the local carrier concentration of graphene is modified and its resistance is altered. The high mobility, large area ohmic contact and metallic conductivity of graphene help to reduce the background noise and thus make it highly sensitive device even small molecular changes at atomic ranges. In this dissertation, Chemical Vapor Deposition (CVD) grown graphene layers were functionalized by self-assembled monolayers (SAMs) and etched anisotropically by H2 for the first time to improve sensor characteristics for toxic gas sensing. CO, CO2, NH3 gases were used as target molecules. Characterization techniques such as Optical Microscopy, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Kelvin Probe Force Microscopy (KPFM), Raman Spectroscopy, Quartz Crystal Microbalance (QCM) and amperometric measurements were used for the investigation of the metal thin film, graphene layers and gas adsorbed film structures. Results indicate that the SAM modification enhanced CO and NH3 absorbing capability of graphene films and also improved their periodic reversible response characteristics. The resistivity results are consistent with frequency change results. Humidity sensitivity of sensors are also decreased significantly due to the applied etching process.