Electrical - Electronic Engineering / Elektrik - Elektronik Mühendisliği

Permanent URI for this collectionhttps://hdl.handle.net/11147/11

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Access type: Open accessSubject: search.filters.subject.Electrostatic actuators

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  • Conference Object
    Citation - Scopus: 2
    Nonlinear Control Techniques for Micro Electrostatic Actuators in the Presence of Parasitics and Parametric Uncertainties
    (ACTA Press, 2011) Salah, Mohammed H.; Al-Jarrah, Ahmad M.; Tatlıcıoğlu, Enver
    In this paper, nonlinear control techniques are developed to control parallel-plate micro electrostatic actuators in the presence of parasitics and parametric uncertainties. The movable plate of the micro actuator is actively controlled utilizing the measurements of internal charge and movable plate's displacement. A velocity observer is designed to estimate the velocity of the plate that is needed for the control algorithm since it is difficult to be measured practically. The proposed backstepping nonlinear control strategies are developed based on a Lyapunov-based analysis, which proves that the desired plate's displacement can be obtained accurately. The proposed nonlinear controllers are capable of controlling the movable plate beyond the pull-in limit in the presence of parametric uncertainties. Representative numerical simulations are presented to demonstrate the performance of the developed nonlinear control strategies in accurately tracking desired deflections of the movable plate within the entire capacitive gap. Finally, a comprehensive performance comparison is performed to examine the effectiveness of the control designs.
  • Conference Object
    Filter-based control for parallel plate micro electrostatic actuators
    (Institute of Electrical and Electronics Engineers Inc., 2011) Salah, Mohammed H.; Bayrak, Alper; Tatlıcıoğlu, Enver
    In this paper, a filter-based nonlinear control strategy for parallel-plate micro electrostatic actuators is designed. The proposed control technique utilizes the measurements of the micro actuator's movable plate displacement and the device internal charge. The information of the micro actuator's movable plate velocity is utilized as well in the control synthesis but since it is difficult to be measured, filtered signals are designed and utilized to facilitate the control development. A Lyapunov-based analysis is presented which proves that a desired time-varying displacement of the micro actuator's movable plate is accurately tracked. The proposed nonlinear controller is capable of controlling the movable plate beyond the pull-in boundary that is one third of the capacitive gap. Representative numerical simulations are introduced to demonstrate the performance of the proposed filter-based nonlinear control strategy in accurately tracking the deflection of the micro electrostatic movable plate within the entire capacitive gap. Finally, a comparison with a standard PID controller is also presented to demonstrate the effectiveness of the proposed control design. © 2011 IEEE.