Improvement of Optical and Electrical Properties of Ito Thin Films by Electro-Annealing

dc.contributor.author Köseoğlu, Hasan
dc.contributor.author Türkoğlu, Fulya
dc.contributor.author Kurt, Metin
dc.contributor.author Yaman, Mutlu Devran
dc.contributor.author Akça, Fatime Gülşah
dc.contributor.author Aygün, Gülnur
dc.contributor.author Özyüzer, Lütfi
dc.coverage.doi 10.1016/j.vacuum.2015.06.027
dc.date.accessioned 2017-07-05T08:52:31Z
dc.date.available 2017-07-05T08:52:31Z
dc.date.issued 2015
dc.description.abstract The effect of electro-annealing in vacuum and air on the optical and electrical properties of ITO thin films grown by large area DC magnetron sputtering was investigated. Moreover, the performances of the electro-annealed ITO thin films in vacuum and air were compared. Electro-annealing was performed by applying 0.75, 1.00, 1.25 and 1.50 A constant ac current to the ITO thin films. It was observed that the crystallinity of the films was better for the ITO thin films electro-annealed in vacuum. The changes in sheet resistance of electro-annealed ITO thin films with applied currents were detailed. The transmittance of the films increased for both electro-annealing in vacuum and air. A correlation between band-gap and resistivity for all of the electro-annealed thin films was observed. en_US
dc.identifier.citation Köseoğlu, H., Türkoğlu, F., Kurt, M., Yaman, M. D., Akça, F. G., Aygün, G., and Özyüzer, L. (2015). Improvement of optical and electrical properties of ITO thin films by electro-annealing. Vacuum, 120, 8-13. doi:10.1016/j.vacuum.2015.06.027 en_US
dc.identifier.doi 10.1016/j.vacuum.2015.06.027 en_US
dc.identifier.doi 10.1016/j.vacuum.2015.06.027
dc.identifier.issn 0042-207X
dc.identifier.issn 0042-207X
dc.identifier.scopus 2-s2.0-84941418863
dc.identifier.uri http://doi.org/10.1016/j.vacuum.2015.06.027
dc.identifier.uri https://hdl.handle.net/11147/5857
dc.language.iso en en_US
dc.publisher Elsevier Ltd. en_US
dc.relation.ispartof Vacuum en_US
dc.rights info:eu-repo/semantics/openAccess en_US
dc.subject Large area magnetron sputtering en_US
dc.subject Annealing en_US
dc.subject Thin films en_US
dc.subject Energy gap en_US
dc.subject ITO thin films en_US
dc.title Improvement of Optical and Electrical Properties of Ito Thin Films by Electro-Annealing en_US
dc.type Article en_US
dspace.entity.type Publication
gdc.author.institutional Köseoğlu, Hasan
gdc.author.institutional Türkoğlu, Fulya
gdc.author.institutional Kurt, Metin
gdc.author.institutional Yaman, Mutlu Devran
gdc.author.institutional Akça, Fatime Gülşah
gdc.author.institutional Aygün, Gülnur
gdc.author.institutional Özyüzer, Lütfi
gdc.author.yokid 204917
gdc.author.yokid 39698
gdc.bip.impulseclass C4
gdc.bip.influenceclass C4
gdc.bip.popularityclass C4
gdc.coar.access open access
gdc.coar.type text::journal::journal article
gdc.collaboration.industrial false
gdc.description.department İzmir Institute of Technology. Physics en_US
gdc.description.endpage 13 en_US
gdc.description.publicationcategory Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı en_US
gdc.description.scopusquality Q1
gdc.description.startpage 8 en_US
gdc.description.volume 120 en_US
gdc.description.wosquality Q2
gdc.identifier.openalex W793373367
gdc.identifier.wos WOS:000361405300003
gdc.index.type WoS
gdc.index.type Scopus
gdc.oaire.accesstype BRONZE
gdc.oaire.diamondjournal false
gdc.oaire.impulse 17.0
gdc.oaire.influence 5.4572213E-9
gdc.oaire.isgreen true
gdc.oaire.keywords Large area magnetron sputtering
gdc.oaire.keywords ITO thin films
gdc.oaire.keywords Thin films
gdc.oaire.keywords Annealing
gdc.oaire.keywords Energy gap
gdc.oaire.popularity 2.98935E-8
gdc.oaire.publicfunded false
gdc.oaire.sciencefields 0103 physical sciences
gdc.oaire.sciencefields 02 engineering and technology
gdc.oaire.sciencefields 0210 nano-technology
gdc.oaire.sciencefields 01 natural sciences
gdc.openalex.collaboration National
gdc.openalex.fwci 2.37271177
gdc.openalex.normalizedpercentile 0.89
gdc.openalex.toppercent TOP 1%
gdc.opencitations.count 57
gdc.plumx.crossrefcites 18
gdc.plumx.mendeley 63
gdc.plumx.scopuscites 64
gdc.scopus.citedcount 64
gdc.wos.citedcount 60
relation.isAuthorOfPublication.latestForDiscovery d2c8e04b-8428-4d4b-a189-fad35a14831f
relation.isOrgUnitOfPublication.latestForDiscovery 9af2b05f-28ac-4003-8abe-a4dfe192da5e

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