Photoconductivity Spectroscopy in Hydrogenated Microcrystalline Silicon Thin Films
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Abstract
Steady-state photoconductivity and sub-bandgap absorption measurements by the dual-beam photoconductivity (DBF) method were carried out on undoped hydrogenated microcrystalline silicon thin films prepared by VHF-PECVD and hot-wire chemical vapor deposition. The results are compared with those of the constant-photocurrent method (CPM) and photothermal deflection spectroscopy (PDS). It is found that DBP, CPM, and PDS provide complementary data on the optoelectronic processes in microcrystalline silicon.
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Keywords
Thin films, Photothermal deflection spectroscopy (PDS), Chemical vapor deposition, Crystalline materials, Hydrogenation, Thin films, Chemical vapor deposition, Crystalline materials, Hydrogenation, Photothermal deflection spectroscopy (PDS)
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Citation
Güneş, M., Akdaş, D., Göktaş, O., Carius, R., Klomfaß, J., and Finger, F. (2003). Photoconductivity spectroscopy in hydrogenated microcrystalline silicon thin films. Journal of Materials Science: Materials in Electronics, 14(10-12), 729-730. doi:10.1023/A:1026147624811
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OpenCitations Citation Count
3
Volume
14
Issue
10-12
Start Page
729
End Page
730
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